To date, materials selection capability in micro/nanosystems applications has been relatively limited, due primarily to the predominance of microfabrication processes and infrastructure dedicated to silicon. While silicon has proven to be an excellent material for many applications, no one material can meet the needs of all applications. Research in this area, therefore, seeks to develop the materials and process technologies required for realization of applications that are either impractical or impossible using conventional silicon-based micromachining, e.g. biomedical and harsh environment applications. Areas of specific interest with this context that are currently under development include anisotropic titanium micromachining, micromechanical composites, and novel applications thereof.
1. The creation of new materials with superior strength, electrical conductivity, conduction or resistance to heat and other properties.
2. Microscopic machines for a variety of uses, including probes that could be injected into the body for medical diagnostics and repair.
3. A technology in which biology and electronics are merged, creating "bio-chips" that detect food-borne contamination, dangerous substances in the blood or chemical warfare agents in the air.
4. The creation of artificial organs and prosthetics that enhance the quality of life.
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