Electron beam machining, focused ion beam and laser beam machining are new processes, providing the energy for material removal in the form of heat. The main advantage of these methods, for both the tool and the workpiece, is the virtually zero machining force. Although the mechanical properties of the workpiece do not affect the machining process, its thermal properties, like the melting point, the boiling point and the heat capacity, greatly influence the machining characteristics, which may cause problems. Furthermore, due to the excessive heat generated on the machined surface, a heat-affected zone is developed, since the molten material remaining on the machined surface re-solidifies during cooling, whilst the structure of the layers underneath the surface changes, resulting in phase transformations in ferrous materials, which may induce residual stresses and changes in the surface hardness. A typical application of focused ion beam is the sharpening of diamond cutting tools to a cutting edge of 10 nm.